Comment evalign SNF 2008-01-15 20:11:10: Mask not level with wafer surface

closega at snf.stanford.edu closega at snf.stanford.edu
Tue Jan 15 20:11:10 PST 2008


I have noticed the mask is not completely level with wafer surface is hard contact (WEC misalignment?). This makes it hard to align properly. Overlay accuracy > 2um. 




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