From yoonjin at snf.stanford.edu  Thu Jun  5 19:07:09 2008
From: yoonjin at snf.stanford.edu (yoonjin at snf.stanford.edu)
Date: Thu, 5 Jun 2008 19:07:09 -0700
Subject: Problem evalign SNF 2008-06-05 19:07:09: Vacuum sensor error message
Message-ID: <mailman.880.1357938359.25704.evalign-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Fri Jun  6 07:39:34 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 6 Jun 2008 07:39:34 -0700
Subject: Problem evalign SNF 2008-06-05 19:07:09: Vacuum sensor error message
Message-ID: <mailman.881.1357938359.25704.evalign-pcs@snf.stanford.edu>

yesyed checked aligned and exposed wafers with no vacuum sensor  problem, everything is working FIne, USERS 
REMEMBER TO ALIGN MICROMETERS BEFORE YOU PUT
YOUR MASK IN  ( Y 5 - 20 X ) IF YOU DO THIS YOU WILL NOT
GET THAT ERROR, Ok to use. 



From gyama at snf.stanford.edu  Fri Jun 13 13:01:29 2008
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Fri, 13 Jun 2008 13:01:29 -0700
Subject: Problem evalign SNF 2008-06-13 13:01:28: mouse frozen
Message-ID: <mailman.882.1357938359.25704.evalign-pcs@snf.stanford.edu>




From gyama at snf.stanford.edu  Fri Jun 13 13:18:15 2008
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Fri, 13 Jun 2008 13:18:15 -0700
Subject: Problem evalign SNF 2008-06-13 13:18:14: never mind, got it to work w/ keyboard
Message-ID: <mailman.883.1357938359.25704.evalign-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Fri Jun 13 13:35:36 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 13 Jun 2008 13:35:36 -0700
Subject: Problem evalign SNF 2008-06-13 13:01:28: mouse frozen
Message-ID: <mailman.884.1357938359.25704.evalign-pcs@snf.stanford.edu>

User Fixed the problem. 



From vilanova at snf.stanford.edu  Fri Jun 13 13:35:53 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 13 Jun 2008 13:35:53 -0700
Subject: Problem evalign SNF 2008-06-13 13:18:14: never mind, got it to work w/ keyboard
Message-ID: <mailman.885.1357938359.25704.evalign-pcs@snf.stanford.edu>

Cleared. 



From vilanova at snf.stanford.edu  Thu Jun 19 14:41:49 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 19 Jun 2008 14:41:49 -0700
Subject: Comment evalign SNF 2008-06-19 14:41:49: MONTHLY LAMP & CALIBRATION COMPLETED
Message-ID: <mailman.886.1357938359.25704.evalign-pcs@snf.stanford.edu>

MONTHLY AND LAMP CALIBRATION COMPLETED
INTENSITY + 14.38MW/CM2
UNIFORMITY = 0.84% ( LESS THAN 1% )