From vilanova at snf.stanford.edu Wed Mar 5 07:53:29 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Mar 2008 07:53:29 -0800 Subject: Shutdown evalign SNF 2008-03-05 07:53:28: monthly lamp change in progress...... Message-ID: From vilanova at snf.stanford.edu Wed Mar 5 09:29:55 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Mar 2008 09:29:55 -0800 Subject: Shutdown evalign SNF 2008-03-05 07:53:28: monthly lamp change in progress...... Message-ID: MOnthly Lamp change and calibration completed. Intensity = 15Mw/Cm2 Uniformity = 1% From mahnaz at snf.stanford.edu Mon Mar 10 13:57:42 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Mar 2008 13:57:42 -0700 Subject: Comment evalign SNF 2008-03-10 13:57:41: WEC replacement Message-ID: Hello all, Just a kind remainder that we are set for wec replacement tomorrow 3/11. The system will go down as soon as the FSE gets here which will be around 10:30 in the morning. mahnaz From gyama at snf.stanford.edu Tue Mar 11 05:49:27 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 11 Mar 2008 05:49:27 -0700 Subject: Problem evalign SNF 2008-03-11 05:49:26: will not initialize Message-ID: From vilanova at snf.stanford.edu Tue Mar 11 07:50:36 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 11 Mar 2008 07:50:36 -0700 Subject: Problem evalign SNF 2008-03-11 05:49:26: will not initialize Message-ID: Initialized machine and software, CHEcked it twice ok to use. From vilanova at snf.stanford.edu Tue Mar 11 15:06:26 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 11 Mar 2008 15:06:26 -0700 Subject: Comment evalign SNF 2008-03-11 15:06:25: WEC Installation Update Message-ID: THe EV ENgineer Got here a little late today, so he will start working on the wec tomorrow morning 3/12/08 Sorry for the inconvinience and sorry Gary Yama for taking over your reservation. :-( From vilanova at snf.stanford.edu Wed Mar 12 06:21:11 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 12 Mar 2008 06:21:11 -0700 Subject: Shutdown evalign SNF 2008-03-12 06:21:10: WEC Replacement In Progress..... Message-ID: From mahnaz at snf.stanford.edu Thu Mar 13 15:10:42 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 13 Mar 2008 15:10:42 -0700 Subject: Shutdown evalign SNF 2008-03-12 06:21:10: WEC Replacement In Progress..... Message-ID: The WEC unit on the system has been replaced. I ran many wafers and 1.5 um L/S has been resolved on all the 5 sites. I am little concern about resolution on both he right and left side of the wafer with flat toward you. The EVG fse is aware of that and we will work on that tomorrow morning. System is up so pleas use it and let me know about any issues and concerns. For 1 um 3612 exposure is 1.2 seconds and lamp uniformity is 12 mw. From mahnaz at snf.stanford.edu Thu Mar 13 15:11:00 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 13 Mar 2008 15:11:00 -0700 Subject: Comment evalign SNF 2008-03-11 15:06:25: WEC Installation Update Message-ID: The WEC unit on the system has been replaced. I ran many wafers and 1.5 um L/S has been resolved on all the 5 sites. I am little concern about resolution on both he right and left side of the wafer with flat toward you. The EVG fse is aware of that and we will work on that tomorrow morning. System is up so pleas use it and let me know about any issues and concerns. For 1 um 3612 exposure is 1.2 seconds and lamp uniformity is 12 mw. From mahnaz at snf.stanford.edu Thu Mar 13 15:11:13 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 13 Mar 2008 15:11:13 -0700 Subject: Comment evalign SNF 2008-03-10 13:57:41: WEC replacement Message-ID: noted. From mahnaz at snf.stanford.edu Thu Mar 13 15:13:08 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 13 Mar 2008 15:13:08 -0700 Subject: Problem evalign SNF 2008-01-16 14:39:58: not able to center the chuck Message-ID: in order to center the chuck, the X micrometer should be on 20 and Y on 5. From mahnaz at snf.stanford.edu Thu Mar 13 15:13:27 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 13 Mar 2008 15:13:27 -0700 Subject: Comment evalign SNF 2008-01-17 15:10:48: Mario worked on the system Message-ID: noted From mahnaz at snf.stanford.edu Thu Mar 13 15:14:52 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 13 Mar 2008 15:14:52 -0700 Subject: Problem evalign SNF 2008-03-13 15:14:52: need to adjust the Left and Right better. Message-ID: From mahnaz at snf.stanford.edu Fri Mar 14 15:58:33 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 14 Mar 2008 15:58:33 -0700 Subject: Problem evalign SNF 2008-03-13 15:14:52: need to adjust the Left and Right better. Message-ID: We did more work on the system today and Linda W. checked the system in bond alignment mode ( thanks Linda). We found that the system moved about 2 um in Y direction. The culprit was the Y micrometer so I thought that I need to order it but Mario came through and had a brand new one which he already installed it for us. So we are good to go on that. We still see the drift in lamp intensity but I do see that on almost all our aligners. I have asked EVG to give me a quote for a integrator which will give us the capability of running the system in constant exposure mode ( due to old software, I am not able to do that now). To center the chuck set the micrometers on X=20 and Y= 5 Exposure for 1 um 3612 resist is around 1.3 +/_ .2 depending on your mask polarity. Please be gentle with system and report any issues and problem on coral. From mahnaz at snf.stanford.edu Mon Mar 17 13:48:18 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 17 Mar 2008 13:48:18 -0700 Subject: Shutdown evalign SNF 2008-03-17 13:48:18: lamp intensity weekly Message-ID: From vilanova at snf.stanford.edu Mon Mar 17 14:56:57 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Mar 2008 14:56:57 -0700 Subject: Shutdown evalign SNF 2008-03-17 13:48:18: lamp intensity weekly Message-ID: I had to recalibrated the lamp due to some big exposure drift,. I found the Lamp intensity at 4.90Mw/Cm2 After calibration I got it up to 10Mw/Cm2 ( normal setting for a 2 weeks lamp period) , The uniformity check came out good 1.99% From mahnaz at snf.stanford.edu Wed Mar 26 16:50:06 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 26 Mar 2008 16:50:06 -0700 Subject: Shutdown evalign SNF 2008-03-26 16:50:04: system is not reseting Message-ID: loss of mask vac. From mahnaz at snf.stanford.edu Wed Mar 26 17:50:27 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 26 Mar 2008 17:50:27 -0700 Subject: Shutdown evalign SNF 2008-03-26 17:50:26: UC04 initialization error Message-ID: system reboots but then gives error "uc04 initialization error" Gary and I tried to restart the system few times with no luck. Called EVG hot line, Gary checked all the cables and coral connections, all seems ok. seems software, hardware problem, log file has been send to EVG. From vilanova at snf.stanford.edu Thu Mar 27 07:24:29 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Mar 2008 07:24:29 -0700 Subject: Shutdown evalign SNF 2008-03-26 16:50:04: system is not reseting Message-ID: I reset the board that moves the ball Plate and also I reconnected the switch ball , I turn the system back on, the computer , Logged in, and I,m not getting the UCXO Error anymore, I did that a few times ( log in, log out) and the system is working normal, we;ll keep an eye on it, maybe one of the boards is going bad. From vilanova at snf.stanford.edu Thu Mar 27 07:24:46 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Mar 2008 07:24:46 -0700 Subject: Shutdown evalign SNF 2008-03-26 17:50:26: UC04 initialization error Message-ID: Please read previous message. From vilanova at snf.stanford.edu Thu Mar 27 08:02:33 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Mar 2008 08:02:33 -0700 Subject: Shutdown evalign SNF 2008-03-27 08:02:32: Z Motor is not working Properly....... Message-ID: The BOard That controls the Z motor and the Switch ball, We need to call the vendor and get a new one. Like I said is intermitent problem but I rather shut it down because I think this will happen again. From gsosa at snf.stanford.edu Fri Mar 28 14:38:12 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 28 Mar 2008 14:38:12 -0700 Subject: Shutdown evalign SNF 2008-03-27 08:02:32: Z Motor is not working Properly....... Message-ID: Replaced UC04 controll board. Checked and cleaned the contact ball on the mask top plate. Checked and repositioned the WEC Z gap. Tested startup many times with no problem. System OK to use.