From mahnaz at snf.stanford.edu Wed May 7 09:09:19 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 7 May 2008 09:09:19 -0700 Subject: Problem evalign SNF 2008-04-30 15:38:29: left focus Message-ID: Evg fes and I tested the system and made some adjustemnet to the system. all good to go. From vilanova at snf.stanford.edu Thu May 8 09:52:00 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 8 May 2008 09:52:00 -0700 Subject: Shutdown evalign SNF 2008-05-08 09:52:00: Lamp MOnthly PM in progress...... Message-ID: From vilanova at snf.stanford.edu Thu May 8 10:51:43 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 8 May 2008 10:51:43 -0700 Subject: Shutdown evalign SNF 2008-05-08 09:52:00: Lamp MOnthly PM in progress...... Message-ID: Lamp Change Completed: Intensity = 14.70MW/CM2 Uniformity = .89% ( less than 1%) From yoonjin at snf.stanford.edu Sun May 11 17:53:55 2008 From: yoonjin at snf.stanford.edu (yoonjin at snf.stanford.edu) Date: Sun, 11 May 2008 17:53:55 -0700 Subject: Problem evalign SNF 2008-05-11 17:53:54: vacuum sensor error message Message-ID: I saw this message with my first try and I couldn't go any more. From vilanova at snf.stanford.edu Mon May 12 07:25:42 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 May 2008 07:25:42 -0700 Subject: Problem evalign SNF 2008-05-11 17:53:54: vacuum sensor error message Message-ID: Everytime you see this error display on the monitor is because of 2 reason: 1) User Didnt center the micrometers properly before they start( theres marks on them) 2) the Oring is missing from the mask plate. In this case was Reason # 1, I put my mask , aligned and exposed without any problems, system ok to use From jparker at snf.stanford.edu Thu May 15 15:10:23 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Thu, 15 May 2008 15:10:23 -0700 Subject: Problem evalign SNF 2008-05-15 15:10:20: "Vacuum sensor error" Message-ID: You get a "Vacuum sensor error -Retry?" error just after focusing on and adjusting your mask. The mask is not pushed up and grabbed. It is safe to answer "No"; the tool ends the process when you do. From vilanova at snf.stanford.edu Fri May 16 09:09:36 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 May 2008 09:09:36 -0700 Subject: Shutdown evalign SNF 2008-05-16 09:09:35: Sensor Mask Plate stuck!! Message-ID: From lindaw at snf.stanford.edu Mon May 19 18:13:53 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 19 May 2008 18:13:53 -0700 Subject: Comment evalign SNF 2008-05-19 18:13:52: any status on evalign? Message-ID: Can we get an update of the evalign status? Please? From vilanova at snf.stanford.edu Tue May 20 08:24:27 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 20 May 2008 08:24:27 -0700 Subject: Shutdown evalign SNF 2008-05-16 09:09:35: Sensor Mask Plate stuck!! Message-ID: adjusted , cleaned , Tested sensor mask plate , we exposed wafers several times and log in and out the system without any vacuum or mask problems, I will leave it on yellow just in case the ball switch get stuck again , if thats the case please report it on coral . MV/Gs From vilanova at snf.stanford.edu Tue May 27 10:01:49 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 May 2008 10:01:49 -0700 Subject: Comment evalign SNF 2008-05-19 18:13:52: any status on evalign? Message-ID: cleared. From vilanova at snf.stanford.edu Tue May 27 10:02:53 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 May 2008 10:02:53 -0700 Subject: Problem evalign SNF 2008-05-15 15:10:20: "Vacuum sensor error" Message-ID: system has been working fine for the last week and a haf No more vacuum sensor error, ok to use.