Shutdown evalign SNF 2008-05-16 09:09:35: Sensor Mask Plate stuck!!

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue May 20 08:24:27 PDT 2008


adjusted , cleaned , Tested  sensor mask plate ,  we 
exposed wafers several times and log in and out  the
system without any vacuum or mask problems, I will leave it
on yellow just in case the ball switch get stuck again , if thats
the case please report it on coral .
MV/Gs




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