Comment evalign SNF 2008-10-30 13:56:28: super shiny bond chuck has missing flag

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Thu Oct 30 13:56:30 PDT 2008


and the vacuum doesn't seem to be holding very tightly to my top wafer.  there is A LOT of lateral and rotational shifting of top wafer when bringing into and out of contact with bottom wafer during aligment.  Unfortunately, the other chuck in in use in the bonder. 




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