Problem evalign SNF 2008-08-29 17:42:52: Lamp intesity needs to be calibrated

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Sep 2 08:09:35 PDT 2008


Lamp has been in use for 2 weeks so as the lamp ages
the intensity decrease I was testing the uniformity and is
within spec and intensity is a little lower than when the lamp 
is new, USER HAS TO INCREASE THE EXPOSURE TIME
AND EXPOSE A DUMMY WAFER  TO SEE HOW MANY
SECONDS ARE NEEDED IT. 




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