From vilanova at snf.stanford.edu Mon Jan 5 11:12:24 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Jan 2009 11:12:24 -0800 Subject: Comment evalign SNF 2009-01-05 11:12:24: lamp calibration completed Message-ID: lamp calibration completed . Uniformity .38% Intensity =14.0 From mahnaz at snf.stanford.edu Wed Jan 14 10:39:39 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Jan 2009 10:39:39 -0800 Subject: Shutdown evalign SNF 2009-01-14 10:39:39: macrometer needs to be adjusted Message-ID: Y one. From vilanova at snf.stanford.edu Wed Jan 14 10:50:48 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Jan 2009 10:50:48 -0800 Subject: Shutdown evalign SNF 2009-01-14 10:39:39: macrometer needs to be adjusted Message-ID: MIcrometer Adjusted And tested, Ok to use. From mahnaz at snf.stanford.edu Wed Jan 14 16:28:54 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Jan 2009 16:28:54 -0800 Subject: Comment evalign SNF 2009-01-14 16:28:53: 1 um 3612 exposure Message-ID: The lamp intensity is at 12mw/cm2 so for 1 um 3612 depending on mask polarity you need fro 1.6 seconds to 1.8 seconds of exposure. From shott at snf.stanford.edu Tue Jan 20 07:32:20 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:32:20 -0800 Subject: Comment evalign SNF 2008-01-15 20:11:10: Mask not level with wafer surface Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:32:25 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:32:25 -0800 Subject: Comment evalign SNF 2008-02-22 08:38:07: Weekly Lamp Calibration Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:32:30 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:32:30 -0800 Subject: Comment evalign SNF 2008-04-15 16:05:39: Tool Update 4/15/08 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:32:36 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:32:36 -0800 Subject: Comment evalign SNF 2008-04-16 10:34:15: Test after 4/15 update Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:32:41 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:32:41 -0800 Subject: Comment evalign SNF 2008-04-16 14:49:42: system working beautifully Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:32:47 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:32:47 -0800 Subject: Comment evalign SNF 2008-06-19 14:41:49: MONTHLY LAMP & CALIBRATION COMPLETED Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:32:53 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:32:53 -0800 Subject: Comment evalign SNF 2008-12-10 12:45:44: scoth tape all over the bond chuck Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:33:01 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:33:01 -0800 Subject: Problem evalign SNF 2008-12-10 13:11:54: the top part of bond chuck has no vacuum Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:33:08 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:33:08 -0800 Subject: Comment evalign SNF 2008-12-10 15:04:16: tried other bond chuck to test vacuum Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:33:15 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:33:15 -0800 Subject: Problem evalign SNF 2008-12-16 12:40:40: bond chuck surface contamination Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:33:25 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:33:25 -0800 Subject: Comment evalign SNF 2008-12-16 12:42:12: make that the shiniest bond chuck with cont. Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:33:31 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:33:31 -0800 Subject: Comment evalign SNF 2009-01-05 11:12:24: lamp calibration completed Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:33:36 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:33:36 -0800 Subject: Comment evalign SNF 2009-01-14 16:28:53: 1 um 3612 exposure Message-ID: To the archives ...