From vilanova at snf.stanford.edu Mon Mar 2 10:57:11 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Mar 2009 10:57:11 -0800 Subject: Shutdown evalign SNF 2009-03-02 10:57:10: Monthly Lamp Change& calibration In progress.... Message-ID: From vilanova at snf.stanford.edu Mon Mar 2 11:25:09 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Mar 2009 11:25:09 -0800 Subject: Shutdown evalign SNF 2009-03-02 10:57:10: Monthly Lamp Change& calibration In progress.... Message-ID: MOnthly Lamp Completed Uniformity =1.0% Intensity = 14.0 Mw/Cm2 From mahnaz at snf.stanford.edu Tue Mar 17 14:26:02 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 17 Mar 2009 14:26:02 -0700 Subject: Problem evalign SNF 2009-03-17 14:26:02: left side mask moves and loss of focus Message-ID: After aligning the mask and focusing it when loaded the wafers the target on the left side moved and lost focus. I unloaded and loaded the mask 3 times and it happened every time. It seems to be an issue with the Z hight and the system makes jerky movement and some times loud noises. I am not sure precision alignment is possible under this condition at all. Secondly, about a year ago we lost the capability of centering the chuck, we are still in the same position and very hard to center the chuck, it needs to be resolved or we need to come up with something new. Those # from while back is not even close to have the chuck centered. From mahnaz at snf.stanford.edu Fri Mar 20 14:09:11 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 20 Mar 2009 14:09:11 -0700 Subject: Problem evalign SNF 2009-03-20 14:09:11: slight focus improvment Message-ID: Gary and Mario worked on the system and we found that the turret was quiet loose on the left side.. I checked the system this morning and still there is loss of focus on the left side but when mask and wafers came in to contact the focus improved. From mahnaz at snf.stanford.edu Thu Mar 26 16:58:32 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 26 Mar 2009 16:58:32 -0700 Subject: Comment evalign SNF 2009-03-26 16:58:32: EVG fse looking into lamp housing. Message-ID: From mahnaz at snf.stanford.edu Thu Mar 26 20:12:24 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 26 Mar 2009 20:12:24 -0700 Subject: Problem evalign SNF 2009-03-26 20:12:23: exposer has changed Message-ID: Today the EVG fse looked into the lamp intensity issue we been having on the system. The issue is that no matter what we are not able to get the intensity to 15mw. We found many things that were wrong or can be replaced and improved. I will send an more detail email out later. But till then with new lamp the intensity is at 9MW so what does this mean, INCREASE YOUR EXPOSURE. For 1 um 3612 at least start with 1.5 to 1.7 seconds and do a TEST WAFER. For 1.6 um 3612 start with 2.2 seconds of exposer. I will do some testing tomorrow and will post them. From lindaw at snf.stanford.edu Sat Mar 28 12:40:59 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 28 Mar 2009 12:40:59 -0700 Subject: Problem evalign SNF 2009-03-28 12:40:59: hissing noise coming from WEC unit Message-ID: From vilanova at snf.stanford.edu Sat Mar 28 13:01:37 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sat, 28 Mar 2009 13:01:37 -0700 Subject: Problem evalign SNF 2009-03-28 12:40:59: hissing noise coming from WEC unit Message-ID: Hissing Noise coming Out of the lamp housing shutter , Field service Engineer Increased the Airflow to it , is not from the WEC . M.V. :-) From lindaw at snf.stanford.edu Sat Mar 28 14:50:57 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 28 Mar 2009 14:50:57 -0700 Subject: Problem evalign SNF 2009-03-28 14:50:56: lots of slop in x-axis micrometer Message-ID: There seems to be quite a bit more slop in the x-axis micrometer than there was last month. It makes bond alignment a tad more timeconsuming than it used to be. Just sayin'. From vilanova at snf.stanford.edu Mon Mar 30 10:47:11 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 30 Mar 2009 10:47:11 -0700 Subject: Problem evalign SNF 2009-03-28 14:50:56: lots of slop in x-axis micrometer Message-ID: Replaced defective X Micrometer. From mahnaz at snf.stanford.edu Mon Mar 30 16:19:39 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 30 Mar 2009 16:19:39 -0700 Subject: Problem evalign SNF 2009-03-30 16:19:38: Wedge compensation Message-ID: I ran a wafer and it sure donot look good. The way the tray takes the mask and comes down and makes the loud noise.... I was not able to resolve 4 um in VAC. mode. I am calling for a pm. From filip at snf.stanford.edu Tue Mar 31 14:46:33 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Tue, 31 Mar 2009 14:46:33 -0700 Subject: Problem evalign SNF 2009-03-31 14:46:33: backside align Message-ID: for bonding - after alignment is done, the wafer 'jumps' 3-4um as the wafers come into contact.