Problem evalign SNF 2009-03-20 14:09:11: slight focus improvment

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Mar 20 14:09:11 PDT 2009


 Gary and Mario worked on the system and we found that the turret was quiet  loose on the left side.. I checked the
system this morning and still there is loss of focus on the left side but when mask and wafers came in to contact the focus improved.




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