Problem evalign SNF 2009-03-30 16:19:38: Wedge compensation

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Mon Mar 30 16:19:39 PDT 2009


I ran a wafer and it sure donot look good.
The way the tray takes the mask and comes down and makes the loud noise....
I was not able to resolve 4 um in VAC. mode.
I am calling for a pm.




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