From mahnaz at snf.stanford.edu Wed May 6 14:13:48 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 6 May 2009 14:13:48 -0700 Subject: Problem evalign SNF 2009-05-06 14:13:46: Y micrometer out of range Message-ID: During training noticed the Y micrometer it should beset on 5 but there is no way I can do that as the hard stop on the unit will not allow that. From vilanova at snf.stanford.edu Thu May 7 14:40:32 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 May 2009 14:40:32 -0700 Subject: Problem evalign SNF 2009-05-06 14:13:46: Y micrometer out of range Message-ID: Adjusted MIcrometer to 5 . From vilanova at snf.stanford.edu Fri May 8 10:17:28 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 8 May 2009 10:17:28 -0700 Subject: Comment evalign SNF 2009-05-08 10:17:28: MOnthly Lamp Change and calibration COmpleted Message-ID: MOnthly Lamp And Calibration Completed. Intensity = 11.53Mw/Cm2 Uniformity = 0.70% ( less the 1 percent , ) I adjusted the Air Valve to the mask plate In and Out now when it goes up /down it does not make a loud noise. From mahnaz at snf.stanford.edu Mon May 11 16:08:57 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 11 May 2009 16:08:57 -0700 Subject: Problem evalign SNF 2009-03-20 14:09:11: slight focus improvment Message-ID: has been resolved. From mahnaz at snf.stanford.edu Mon May 11 16:21:58 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 11 May 2009 16:21:58 -0700 Subject: Problem evalign SNF 2009-05-11 16:21:58: top/bottom shifts Message-ID: I tested top side alignment when wafer and mask go to contact there is a 4 to 5 um shift upward. In the back side alignment, the shift is lager and when wafer comes to contact wafer moves upward. There is a loud hissing sound at all the time and during process when moving tray in/ out the tray makes noise like it has dropped out of its place. From mahnaz at snf.stanford.edu Mon May 11 16:27:26 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 11 May 2009 16:27:26 -0700 Subject: Comment evalign SNF 2009-05-11 16:27:25: shutter Message-ID: lamp shutter was put in on 5/7 in order to increase/ improve the lamp intensity. From zguo at snf.stanford.edu Wed May 13 11:35:02 2009 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Wed, 13 May 2009 11:35:02 -0700 Subject: Shutdown evalign SNF 2009-05-13 11:35:02: pressure sensor error Message-ID: Mahnaz has inspected it. there is no wedge compensation. From vilanova at snf.stanford.edu Wed May 13 15:25:25 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 May 2009 15:25:25 -0700 Subject: Shutdown evalign SNF 2009-05-13 11:35:02: pressure sensor error Message-ID: adjusted MAsk plate and wafer sensor plate, Tested a few times, and exposed wafers, ok to use From lindaw at snf.stanford.edu Mon May 18 12:36:25 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 18 May 2009 12:36:25 -0700 Subject: Comment evalign SNF 2009-05-18 12:36:24: found right bottom objective very loose Message-ID: Someone had unscrewed the right bottom objective. I tightened it back to where it is supposed to be. From gsosa at snf.stanford.edu Tue May 19 07:52:21 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 May 2009 07:52:21 -0700 Subject: Comment evalign SNF 2009-05-18 12:36:24: found right bottom objective very loose Message-ID: Also found the spacer for the objective not in place causing a focussing problem. Found the spacer off to the side of the microscope. Re-installed the spacer onto right objective base. Linda tested out BSA focus. All OK. From gsosa at snf.stanford.edu Tue May 26 15:06:03 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 26 May 2009 15:06:03 -0700 Subject: Comment evalign SNF 2009-05-26 15:06:03: loud noise when unloading Message-ID: Loud noise when unloading a substate(mask or wafer). Tray up speed is too fast and tray not level. Adjusted tray level by loosening the 4 mounting screws for the in/out assembly. Leveled and retightenes screws for unit. Adjusted speed of up/down motion using the pneumatic spped control valves located at the front of the WEC. Tray now travles up and down smoothly with no noticable noise. From wessmith at snf.stanford.edu Sun May 31 13:00:21 2009 From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu) Date: Sun, 31 May 2009 13:00:21 -0700 Subject: Problem evalign SNF 2009-05-31 13:00:20: Loss of microscope and focus control Message-ID: Mid-way through alignment, the controls for the focus and microscope position froze. Exiting the program and starting over seemed to fix the problem, but this is the second time this has happened to me. From wessmith at snf.stanford.edu Sun May 31 13:54:07 2009 From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu) Date: Sun, 31 May 2009 13:54:07 -0700 Subject: Comment evalign SNF 2009-05-31 13:54:06: Problem Solved Message-ID: The loss of optic control is regained when Scan Optic re-highlighted on the right side of the screen