Problem evalign SNF 2009-05-11 16:21:58: top/bottom shifts

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Mon May 11 16:21:58 PDT 2009


I tested top side alignment when wafer and mask go to contact there is a 4 to 5 um shift upward.
In the back side alignment, the shift is lager and when  wafer comes to contact wafer  moves upward.
There is a loud hissing sound at all the time and during process when moving tray in/ out the tray makes noise like it has dropped out of its place.




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