Comment evalign SNF 2009-05-26 15:06:03: loud noise when unloading

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue May 26 15:06:03 PDT 2009


Loud noise when unloading a substate(mask or wafer). Tray up speed is too fast and tray not level. Adjusted tray level by loosening the 4 mounting screws for the in/out assembly. Leveled and retightenes screws for unit. Adjusted speed of up/down motion using the pneumatic spped control valves located at the front of the WEC. Tray now travles up and down smoothly with no noticable noise. 




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