From lindaw at snf.stanford.edu Thu Oct 1 13:39:51 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 1 Oct 2009 13:39:51 -0700 Subject: Comment evalign SNF 2009-10-01 13:39:50: bond chuck needs new flag Message-ID: The unpolished bond chuck has a flag that has the tip broken off. From vilanova at snf.stanford.edu Thu Oct 1 13:58:25 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Oct 2009 13:58:25 -0700 Subject: Comment evalign SNF 2009-10-01 13:39:50: bond chuck needs new flag Message-ID: flag has been replaced.ok to use now. From vilanova at snf.stanford.edu Thu Oct 1 14:26:15 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Oct 2009 14:26:15 -0700 Subject: Problem evalign SNF 2009-05-11 16:21:58: top/bottom shifts Message-ID: we have tested top side alignment when wafer and when mask go to contact there is no more shift ( we use to see a 4 to 5 um shift upward) In the past but I guess the problem got resolve now. . From vilanova at snf.stanford.edu Thu Oct 1 14:29:01 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Oct 2009 14:29:01 -0700 Subject: Problem evalign SNF 2009-03-17 14:26:02: left side mask moves and loss of focus Message-ID: We have adujsted all micrometer to the way they were before now the chuck is nice and center , we have also adjust the mask holde in and out settings so now is nice and smooth . From vilanova at snf.stanford.edu Thu Oct 1 14:30:44 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Oct 2009 14:30:44 -0700 Subject: Problem evalign SNF 2009-03-26 20:12:23: exposer has changed Message-ID: I think that by now everyoine knows that the intensity has change from 15Mw/Cm2 to 10 10Mw/Cm2 NCREASE YOUR EXPOSURE. For 1 um 3612 at least start with 1.5 to 1.7 seconds and do a TEST WAFER. For 1.6 um 3612 start with 2.2 seconds of exposer. From vilanova at snf.stanford.edu Thu Oct 1 14:32:00 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Oct 2009 14:32:00 -0700 Subject: Problem evalign SNF 2009-03-30 16:19:38: Wedge compensation Message-ID: please read previous messages. From vilanova at snf.stanford.edu Thu Oct 1 14:32:22 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Oct 2009 14:32:22 -0700 Subject: Comment evalign SNF 2009-02-05 10:01:21: Where is the unpolished bond chuck? Message-ID: cleared. From vilanova at snf.stanford.edu Thu Oct 1 14:32:29 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Oct 2009 14:32:29 -0700 Subject: Comment evalign SNF 2009-02-16 17:37:08: unpolished bond chuck Message-ID: cleared. From vilanova at snf.stanford.edu Mon Oct 5 13:50:20 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Oct 2009 13:50:20 -0700 Subject: Shutdown evalign SNF 2009-10-05 13:50:20: MOnthly Lamp Change In progress...... Message-ID: From vilanova at snf.stanford.edu Mon Oct 5 14:26:19 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:26:19 -0700 Subject: Shutdown evalign SNF 2009-10-05 13:50:20: MOnthly Lamp Change In progress...... Message-ID: Monthly Lamp Change and calibration Completed.- Intensity = 10.20Mw/Cm2 Uniformity = 2.10% Ready to use.