Problem evalign SNF 2009-05-11 16:21:58: top/bottom shifts

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Oct 1 14:26:15 PDT 2009


 we have tested top side alignment when wafer and when  mask go to 
contact there is no more shift ( we use to see a  4 to 5 um shift upward)
In the past but I guess the problem got resolve now. .




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