Problem evalign SNF 2009-03-26 20:12:23: exposer has changed

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Oct 1 14:30:44 PDT 2009


I think that by now everyoine knows that the intensity has change from 
15Mw/Cm2 to 10 10Mw/Cm2  NCREASE YOUR EXPOSURE.
For 1 um 3612 at least start with 1.5 to 1.7 seconds and do a 
TEST WAFER. For 1.6 um 3612 start with 2.2 seconds of exposer.




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