I think that by now everyoine knows that the intensity has change from 15Mw/Cm2 to 10 10Mw/Cm2 NCREASE YOUR EXPOSURE. For 1 um 3612 at least start with 1.5 to 1.7 seconds and do a TEST WAFER. For 1.6 um 3612 start with 2.2 seconds of exposer.