Comment evalign SNF 2010-08-13 14:20:08: Hard contact not leveling

tzhu at snf.stanford.edu tzhu at snf.stanford.edu
Fri Aug 13 14:20:09 PDT 2010


Hi Mahnaz,
After serveral months tracking, I found the evaligner 2 inch chuck may not leveling during the hard contact exposure, I have evidence on the same location all the time for not developing well, I doubt the intensiity will cause this issue, since I am using 2 inch wafers, but that's only my suggestions, your help to fix that will be truely appreciated.
Thanks a lot.




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