Problem evalign SNF 2010-02-19 14:56:00: vacuum sensor error

malekos at snf.stanford.edu malekos at snf.stanford.edu
Fri Feb 19 14:56:01 PST 2010


Vacuum Sensor error, would not take mask.  Whoever used the tool before me left it in a poor state. Replaced chuck, left mask holder in machine, did not exit properly.




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