Comment evalign SNF 2010-02-20 14:58:26: Megasonic still not working.

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sat Feb 20 14:58:27 PST 2010


I tried resetting, no luck. Then I tried turning the power off and back on like I  was shown on thursday, but the chuck still does not spin, and the error #5 & 6 lights flash.  tried to bond my wafers without the megasonic clean, but to no avail.




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