From mahnaz at snf.stanford.edu Fri Jan 8 11:42:20 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 8 Jan 2010 11:42:20 -0800 Subject: Problem evalign SNF 2010-01-08 11:42:19: joystick over shoot Message-ID: I ran the system today and the left joystick overshoot. From mahnaz at snf.stanford.edu Fri Jan 8 11:43:49 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 8 Jan 2010 11:43:49 -0800 Subject: Problem evalign SNF 2010-01-08 11:43:49: exposure change Message-ID: Due to low lamp intensity the exposure has changed the whole lot please make sure to read the comment. From mahnaz at snf.stanford.edu Fri Jan 8 11:51:12 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 8 Jan 2010 11:51:12 -0800 Subject: Comment evalign SNF 2010-01-08 11:51:11: Exposure change Message-ID: These are huge changes so please make a note of it. 1 um 3612 requires 1.8 seconds of exposure, I used hard contact. 1.6 um 3612 requires 2.8 to 3 seconds of exposure, I used hard contact. 3 um 220-3 requires 4.2 to 4.5 seconds of exposure, I used hard contact. I noticed that the right side ( flat toward me) did not perform as well as the rest of the wafer.