Comment evalign SNF 2010-01-08 11:51:11: Exposure change

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Jan 8 11:51:12 PST 2010


These are huge changes so please make a note of it.
1 um 3612 requires 1.8 seconds of exposure, I used hard contact.
1.6 um  3612 requires 2.8 to 3  seconds of exposure, I used hard
 contact.
 3 um 220-3  requires 4.2 to 4.5  seconds of exposure, I used hard 
contact.
I noticed that the right side ( flat toward me) did not perform as well as
 the rest of the wafer.




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