From gsosa at snf.stanford.edu Thu Jun 10 15:51:07 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Jun 2010 15:51:07 -0700 Subject: Comment evalign SNF 2010-06-10 15:51:06: Lamp Change Message-ID: Replaced and set up UV lamp. Average intensity is 10.55 Mw/cm2. Lamp Uniformity is at 1.56% From gsosa at snf.stanford.edu Mon Jun 14 11:42:09 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 Jun 2010 11:42:09 -0700 Subject: Comment evalign SNF 2010-06-14 11:42:08: Lamp Intensity Message-ID: Powered off lamp to inspect lamp house. Powered up and stabilized the lamp. Adjusted for maximum intensity. Intensity average= 10.37, Uniformity = 1.42% From mahnaz at snf.stanford.edu Tue Jun 15 10:56:19 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 15 Jun 2010 10:56:19 -0700 Subject: Shutdown evalign SNF 2010-06-15 10:56:19: we like to check the lamp housing Message-ID: Gary, mario and mahnaz From gsosa at snf.stanford.edu Tue Jun 15 15:20:27 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 15 Jun 2010 15:20:27 -0700 Subject: Shutdown evalign SNF 2010-06-15 10:56:19: we like to check the lamp housing Message-ID: Inspected lamphouse optical elements. Fly's eye lens looks good- no discoloration. Starting intensity: 9.17 mw/cm2. Changed out front 45 deg. reflecting mirror. Intensity increased to 11.42 mw/cm2, Uniformity @ 1.92%. Installed new elipsoid reflector. Intensity increased from 11.42 mw/cm2 to 14.26 mw/cm2, Uniformity @ 1.51%.. From mahnaz at snf.stanford.edu Wed Jun 16 09:43:07 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 16 Jun 2010 09:43:07 -0700 Subject: Comment evalign SNF 2010-06-16 09:43:07: exposure change Message-ID: We changed the Ellipsoidal mirror (New one) and swapped the 45 degree reflection mirror with the NIL tool. The lamp intensity is at 14mw and Gary and Mario will check the intensity twice a week to be sure we will stay on the track. I did test the system last night 3612 1 um exposure 1.2 seconds 3612 1.6 um exposure 1.7 seconds 220-3 3 um exposure 3.2 seconds All of this been documented in the little binder next to the tool. From mahnaz at snf.stanford.edu Wed Jun 16 09:44:39 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 16 Jun 2010 09:44:39 -0700 Subject: Comment evalign SNF 2010-06-16 09:44:39: Nil reflection mirror taken Message-ID: we changed the Ellipsoidal mirror (New one) and swapped the 45 degree reflection mirror with the NIL tool. The lamp intensity is at 14mw and Gary and Mario will check the intensity twice a week to be sure we will stay on the track. From uli at snf.stanford.edu Wed Jun 16 09:46:50 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 16 Jun 2010 09:46:50 -0700 Subject: Comment evalign SNF 2010-06-16 09:46:50: testing Message-ID: From mahnaz at snf.stanford.edu Wed Jun 16 09:48:46 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 16 Jun 2010 09:48:46 -0700 Subject: Comment evalign SNF 2010-06-16 09:48:46: swapped 45 front refelction mirror with NIL Message-ID: we changed the Ellipsoidal mirror (New one) and swapped the 45 degree reflection mirror with the NIL tool. The lamp intensity is at 14mw and Gary and Mario will check the intensity twice a week to be sure we will stay on the track. From mahnaz at snf.stanford.edu Wed Jun 16 14:56:09 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 16 Jun 2010 14:56:09 -0700 Subject: Comment evalign SNF 2010-06-16 14:56:08: Reflector mirror change Message-ID: Inspected lamphouse optical elements. Fly's eye lens looks good- no discoloration. Starting intensity: 9.17 mw/cm2. Changed out front 45 deg. reflecting mirror. Intensity increased to 11.42 mw/cm2, Uniformity @ 1.92%. Installed new elipsoid reflector. Intensity increased from 11.42 mw/cm2 to 14.26 mw/cm2, Uniformity @ 1.51%.. From gsosa at snf.stanford.edu Thu Jun 17 09:00:28 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Jun 2010 09:00:28 -0700 Subject: Comment evalign SNF 2010-06-17 09:00:27: Intensity Check 6/17/10 Message-ID: Center Intensity: 13.86 Average(5spots): 13.83 Uniformity: 1.05 From mahnaz at snf.stanford.edu Fri Jun 18 15:46:06 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 18 Jun 2010 15:46:06 -0700 Subject: Comment evalign SNF 2010-06-16 09:46:50: testing Message-ID: From mahnaz at snf.stanford.edu Fri Jun 18 15:46:23 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 18 Jun 2010 15:46:23 -0700 Subject: Comment evalign SNF 2010-03-23 09:01:30: Megasonic cleaner is up Message-ID: wrong tool From gsosa at snf.stanford.edu Mon Jun 21 14:28:54 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Jun 2010 14:28:54 -0700 Subject: Comment evalign SNF 2010-06-21 14:28:54: Intensity Check 6/21/10 Message-ID: Intensity Check- 6/21/2010 Intensity Ave: 12.41 mw/cm2 Uniformity: 1.53 From gsosa at snf.stanford.edu Wed Jun 23 11:35:45 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 23 Jun 2010 11:35:45 -0700 Subject: Comment evalign SNF 2010-06-23 11:35:44: Intensity Check 6/23 Message-ID: Intensity Check 6/23/10 Intensity Average: 11.81 mw/cm2 Uniformity: 2.25% From gsosa at snf.stanford.edu Mon Jun 28 08:56:09 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 28 Jun 2010 08:56:09 -0700 Subject: Comment evalign SNF 2010-06-28 08:56:09: Intensity Check 6/28 Message-ID: Intensity Check Average Intensity: 10.92 mw/cm2 Uniformity: 1.42% From vilanova at snf.stanford.edu Tue Jun 29 14:17:37 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Jun 2010 14:17:37 -0700 Subject: Problem evalign SNF 2009-03-31 14:46:33: backside align Message-ID: this is a problem that is hasnt been cleared for a while and I remember that the problem was the bonding chuck and not the actual tool. From tzhu at snf.stanford.edu Tue Jun 29 17:16:07 2010 From: tzhu at snf.stanford.edu (tzhu at snf.stanford.edu) Date: Tue, 29 Jun 2010 17:16:07 -0700 Subject: Problem evalign SNF 2010-06-29 17:16:07: Not hard contact during exposure Message-ID: The machine is not doing hard contact during exposure, very abnormal and cause me several times re-work... From gsosa at snf.stanford.edu Wed Jun 30 09:23:10 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 30 Jun 2010 09:23:10 -0700 Subject: Comment evalign SNF 2010-06-30 09:23:10: Intensity Check 6/30 Message-ID: Intensity Check 6/30 Intensity Average: 10.55 mw/cm2 Uniformity: 1.23% From gsosa at snf.stanford.edu Wed Jun 30 11:58:54 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 30 Jun 2010 11:58:54 -0700 Subject: Comment evalign SNF 2010-06-30 11:58:54: System Reset Message-ID: Reset all software and Hardware. Full initialization- OK. From mahnaz at snf.stanford.edu Wed Jun 30 13:57:50 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 30 Jun 2010 13:57:50 -0700 Subject: Problem evalign SNF 2010-06-29 17:16:07: Not hard contact during exposure Message-ID: gary did a hard reset , checked with Gavin, alignment all good.