From vilanova at snf.stanford.edu Thu Mar 11 08:24:08 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 11 Mar 2010 08:24:08 -0800 Subject: Comment evalign SNF 2010-03-11 08:24:07: Megasonic Cleaner Update!! Message-ID: the megasonic Cleaner Controller is dead , it will take 2 weeks or so to get the part from Europe. Sorry For the inconvinience. From vilanova at snf.stanford.edu Mon Mar 15 18:05:53 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Mar 2010 18:05:53 -0700 Subject: Problem evalign SNF 2010-01-08 11:42:19: joystick over shoot Message-ID: Adjusted Joystick and tested. From gsosa at snf.stanford.edu Tue Mar 23 09:00:23 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 23 Mar 2010 09:00:23 -0700 Subject: Comment evalign SNF 2010-02-20 14:58:26: Megasonic still not working. Message-ID: The megasonic cleaned is back up. We replaced the controller board for the spin motor and made chuck vacuum adjustments. Tested oparation with the process program. All looks good. From gsosa at snf.stanford.edu Tue Mar 23 09:00:42 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 23 Mar 2010 09:00:42 -0700 Subject: Comment evalign SNF 2010-03-11 08:24:07: Megasonic Cleaner Update!! Message-ID: The megasonic cleaned is back up. We replaced the controller board for the spin motor and made chuck vacuum adjustments. Tested oparation with the process program. All looks good. From gsosa at snf.stanford.edu Tue Mar 23 09:01:30 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 23 Mar 2010 09:01:30 -0700 Subject: Comment evalign SNF 2010-03-23 09:01:30: Megasonic cleaner is up Message-ID: The megasonic cleaned is back up. We replaced the controller board for the spin motor and made chuck vacuum adjustments. Tested oparation with the process program. All looks good. From lindaw at snf.stanford.edu Thu Mar 25 14:08:08 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 25 Mar 2010 14:08:08 -0700 Subject: Problem evalign SNF 2010-03-25 14:08:07: bond chuck flag whack Message-ID: The top flag on the unpolished bond chuck is bent too far out from chuck surface. runs into bond glass when loading top wafer. Can someone please replace the flag? thanks in advance. From tzhu at snf.stanford.edu Fri Mar 26 12:19:48 2010 From: tzhu at snf.stanford.edu (tzhu at snf.stanford.edu) Date: Fri, 26 Mar 2010 12:19:48 -0700 Subject: Shutdown evalign SNF 2010-03-26 12:19:47: vacuum sensor error Message-ID: try different clean blank mask, still can not hold. From gsosa at snf.stanford.edu Fri Mar 26 12:43:56 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Mar 2010 12:43:56 -0700 Subject: Shutdown evalign SNF 2010-03-26 12:19:47: vacuum sensor error Message-ID: Checked and replaced oring for mask vavcuum port. Loaded dummy mask OK. From vilanova at snf.stanford.edu Fri Mar 26 15:40:32 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 26 Mar 2010 15:40:32 -0700 Subject: Problem evalign SNF 2010-03-25 14:08:07: bond chuck flag whack Message-ID: The flags were replaced earlier today.