Comment evalign SNF 2010-02-20 14:58:26: Megasonic still not working.
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Tue Mar 23 09:00:23 PDT 2010
The megasonic cleaned is back up. We replaced the controller board for the spin motor and made chuck vacuum adjustments. Tested oparation with the process program. All looks good.
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