Comment evalign SNF 2010-03-11 08:24:07: Megasonic Cleaner Update!!

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Mar 23 09:00:42 PDT 2010


The megasonic cleaned is back up. We replaced the controller board for the spin motor and made chuck vacuum adjustments. Tested oparation with the process program. All looks good.




More information about the evalign-pcs mailing list