From vilanova at snf.stanford.edu Mon Nov 1 14:45:53 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 1 Nov 2010 14:45:53 -0700 Subject: Comment evalign SNF 2010-11-01 14:45:53: weekly calibration Results Message-ID: Weekly Calibration Results Uniformity = 093% Intensity Average = 11.82mW/Cm2 From gyama at snf.stanford.edu Tue Nov 2 12:31:07 2010 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 2 Nov 2010 12:31:07 -0700 Subject: Problem evalign SNF 2010-11-02 12:31:06: 1.0um 3612, hard cont, 1.2s Message-ID: didn't develop around edge, ~1cm. tried respinning twice & developing twice, still problem. wafers spun at same time & exposed on ASML, fine From mahnaz at stanford.edu Tue Nov 2 13:13:38 2010 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 02 Nov 2010 13:13:38 -0700 Subject: Problem evalign SNF 2010-11-02 12:31:06: 1.0um 3612, hard cont, 1.2s In-Reply-To: <20101102193107.6062B4294@smtp-unencrypted.stanford.edu> References: <20101102193107.6062B4294@smtp-unencrypted.stanford.edu> Message-ID: <4CD070F2.1060200@stanford.edu> Hi If you look at the update Mario had attached to the system the intensity reads about 11mw so at least needed about 1.7 seconds of exposure. mahnaz On 11/2/2010 12:31 PM, gyama at snf.stanford.edu wrote: > didn't develop around edge, ~1cm. > tried respinning twice& developing twice, still problem. > wafers spun at same time& exposed on ASML, fine > From mahnaz at snf.stanford.edu Tue Nov 2 13:30:43 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 2 Nov 2010 13:30:43 -0700 Subject: Problem evalign SNF 2010-11-02 12:31:06: 1.0um 3612, hard cont, 1.2s Message-ID: If you look at the intensity measurment from yesterday is at 11.8MW So the lamp is off from being 15 mw for 1 um at least 1.6 seconds needed The exposure needs to be calculated. TimeXintensity 15= exposure We are measuring the intensity evry week and logged on the tool. From mahnaz at snf.stanford.edu Tue Nov 2 13:31:06 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 2 Nov 2010 13:31:06 -0700 Subject: Comment evalign SNF 2010-08-04 10:56:45: weekly Lamp Intensity + Calibration ...... Message-ID: From mahnaz at snf.stanford.edu Tue Nov 2 13:31:15 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 2 Nov 2010 13:31:15 -0700 Subject: Comment evalign SNF 2010-08-06 08:57:00: adjusted and calibrated Joystick Message-ID: From mahnaz at snf.stanford.edu Tue Nov 2 13:31:21 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 2 Nov 2010 13:31:21 -0700 Subject: Comment evalign SNF 2010-08-09 14:27:30: Scheduled lamp change 8/9 Message-ID: From mahnaz at snf.stanford.edu Tue Nov 2 13:31:51 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 2 Nov 2010 13:31:51 -0700 Subject: Problem evalign SNF 2010-01-08 11:43:49: exposure change Message-ID: noted From zguo at snf.stanford.edu Sat Nov 6 14:37:32 2010 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Sat, 6 Nov 2010 14:37:32 -0700 Subject: Problem evalign SNF 2010-11-06 14:37:31: rotation knob not sensitive Message-ID: the rotation knob is not accurate any more From vilanova at snf.stanford.edu Mon Nov 8 08:42:00 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Nov 2010 08:42:00 -0800 Subject: Problem evalign SNF 2010-11-06 14:37:31: rotation knob not sensitive Message-ID: Calibrated Rotation Knob ,Joystick and tested, Ok to use. From vilanova at snf.stanford.edu Fri Nov 12 09:05:17 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 12 Nov 2010 09:05:17 -0800 Subject: Comment evalign SNF 2010-11-12 09:05:17: Monthly Lamp change and calibration Message-ID: Monthly Lamp change and calibration: Intensity Average = 15.0Mw/cm2 Uniformity = 0.94% From lindaw at snf.stanford.edu Fri Nov 19 12:24:57 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 19 Nov 2010 12:24:57 -0800 Subject: Shutdown evalign SNF 2010-11-19 12:24:56: screen frozen Message-ID: I tried ctrl alt del from the keyboard, nothing. screensaver pattern is frozen on screen. From gsosa at snf.stanford.edu Fri Nov 19 12:39:33 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Nov 2010 12:39:33 -0800 Subject: Shutdown evalign SNF 2010-11-19 12:24:56: screen frozen Message-ID: Restarted computer and dis full hardware and software reset.