Problem evalign SNF 2010-11-02 12:31:06: 1.0um 3612, hard cont, 1.2s

gyama at snf.stanford.edu gyama at snf.stanford.edu
Tue Nov 2 12:31:07 PDT 2010


didn't develop around edge, ~1cm.
tried respinning twice & developing twice, still problem.
wafers spun at same time & exposed on ASML, fine




More information about the evalign-pcs mailing list