Problem evalign SNF 2010-11-02 12:31:06: 1.0um 3612, hard cont, 1.2s

Mahnaz Mansourpour mahnaz at stanford.edu
Tue Nov 2 13:13:38 PDT 2010


Hi

If you look at the update Mario had attached to the system the intensity 
reads about 11mw so at least needed about 1.7 seconds of exposure.

mahnaz

On 11/2/2010 12:31 PM, gyama at snf.stanford.edu wrote:
> didn't develop around edge, ~1cm.
> tried respinning twice&  developing twice, still problem.
> wafers spun at same time&  exposed on ASML, fine
>



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