Problem evalign SNF 2010-11-02 12:31:06: 1.0um 3612, hard cont, 1.2s

Mahnaz Mansourpour mahnaz at
Tue Nov 2 13:13:38 PDT 2010


If you look at the update Mario had attached to the system the intensity 
reads about 11mw so at least needed about 1.7 seconds of exposure.


On 11/2/2010 12:31 PM, gyama at wrote:
> didn't develop around edge, ~1cm.
> tried respinning twice&  developing twice, still problem.
> wafers spun at same time&  exposed on ASML, fine

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