From vilanova at snf.stanford.edu Tue Aug 2 08:12:55 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 2 Aug 2011 08:12:55 -0700 Subject: Shutdown evalign SNF 2011-08-02 08:12:55: monthly lamp change and calibration In progress.... Message-ID: From vilanova at snf.stanford.edu Tue Aug 2 09:26:30 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 2 Aug 2011 09:26:30 -0700 Subject: Shutdown evalign SNF 2011-08-02 08:12:55: monthly lamp change and calibration In progress.... Message-ID: lamp change and calibration completed. Average Intensity = 13.17Mw/Cm2 Uniformity = 1.21% From vilanova at snf.stanford.edu Tue Aug 2 09:26:52 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 2 Aug 2011 09:26:52 -0700 Subject: Comment evalign SNF 2011-08-02 09:26:52: lamp changed and calibrated Message-ID: lamp change and calibration completed. Average Intensity = 13.17Mw/Cm2 Uniformity = 1.21% From vilanova at snf.stanford.edu Mon Aug 15 14:26:28 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Aug 2011 14:26:28 -0700 Subject: Comment evalign SNF 2011-08-15 14:26:28: Lamp Calibration Results Message-ID: Lamp Intensity Average = 10.88Mw/Cm2 Uniformity = 2.02% From lindaw at snf.stanford.edu Thu Aug 25 16:41:43 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 25 Aug 2011 16:41:43 -0700 Subject: Shutdown evalign SNF 2011-08-25 16:41:42: system won't initialize Message-ID: Problem started when aligning two wafers in the bond chuck. After successfully bonding two pairs of wafers, I was using the sep/cont button to contact and separate wafers for alignment, when I pressed button to separate, the bottom chuck just kept going all the way down to it's stand by position. Pressing the sep/cont button did not bring the chuck back up. I pressed undo to back out of the program and unload both wafers. When I tried to reload top wafer, the chuck went up for wedge compansation, but then slowly sank all the way down to the standby position without loading my wafer to the bond chuck. I moved the tray out and closed the program and reopened it, but now it won't initialize. At the same time the svgcoat2 had a strange error message and the user's wafer would not relaease from the spin chuck, and the megasonic also had error message 1 & 2 and would not run. Was there some sort of N2/air/vac problem that glitched everything out"? From vilanova at snf.stanford.edu Fri Aug 26 08:21:19 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 26 Aug 2011 08:21:19 -0700 Subject: Shutdown evalign SNF 2011-08-25 16:41:42: system won't initialize Message-ID: Found Top mask Connector Loose, Reconnected and tested a few times, Inserted mask and exposed Wafers, System Ok to use From mtan at snf.stanford.edu Sun Aug 28 12:42:12 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 28 Aug 2011 12:42:12 -0700 Subject: Problem evalign SNF 2011-08-28 12:42:12: machine is stuck with my mask inside Message-ID: From mtan at snf.stanford.edu Sun Aug 28 12:42:51 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 28 Aug 2011 12:42:51 -0700 Subject: Shutdown evalign SNF 2011-08-28 12:42:50: machine is stuck with mask inside Message-ID: From cbaxter at snf.stanford.edu Sun Aug 28 15:58:28 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 28 Aug 2011 15:58:28 -0700 Subject: Shutdown evalign SNF 2011-08-28 15:58:28: Lamp will not turn on Message-ID: Recovred the stuck lamp, but now the lamp will not turn on. From vilanova at snf.stanford.edu Mon Aug 29 07:36:59 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Aug 2011 07:36:59 -0700 Subject: Shutdown evalign SNF 2011-08-28 15:58:28: Lamp will not turn on Message-ID: Restarted Lamp POwer Supply, Initialized System , Tested System , Exposed wafers , System Operationsd are Ok, Ready to use. From vilanova at snf.stanford.edu Mon Aug 29 07:37:35 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Aug 2011 07:37:35 -0700 Subject: Shutdown evalign SNF 2011-08-28 12:42:50: machine is stuck with mask inside Message-ID: Restarted Power Supply and Initialized System , tested, All operations are Ok , Ok to use From vilanova at snf.stanford.edu Mon Aug 29 07:37:41 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Aug 2011 07:37:41 -0700 Subject: Problem evalign SNF 2011-08-28 12:42:12: machine is stuck with my mask inside Message-ID: Restarted Power Supply and Initialized System , tested, All operations are Ok , Ok to use