From vilanova at snf.stanford.edu Tue Feb 1 10:48:59 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Feb 2011 10:48:59 -0800 Subject: Shutdown evalign SNF 2011-02-01 10:48:57: monthly lamp change in progress... Message-ID: From vilanova at snf.stanford.edu Tue Feb 1 11:16:02 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Feb 2011 11:16:02 -0800 Subject: Shutdown evalign SNF 2011-02-01 10:48:57: monthly lamp change in progress... Message-ID: Monthly Lamp change Results: Uniformity = 1.60% Intensity = 14.76Mw/Cm2 From vilanova at snf.stanford.edu Fri Feb 11 08:08:57 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 08:08:57 -0800 Subject: Comment evalign SNF 2011-02-11 08:08:56: Weekly lamp calibration Results Message-ID: Weekly lamp calibration Results: Average Intensaity = 12.25Mw/Cm2 Uniformity = 1.68% From mihirt at snf.stanford.edu Mon Feb 14 20:26:53 2011 From: mihirt at snf.stanford.edu (mihirt at snf.stanford.edu) Date: Mon, 14 Feb 2011 20:26:53 -0800 Subject: Problem evalign SNF 2011-02-14 20:26:52: Screen does not turn on Message-ID: Screen was frozen when I got there (screensaver would not move). I turned the power on and off -- sorry, I was desperate to get my processing done. Now the system is one, but the screen registers no signal and goes to "idle" mode. From vilanova at snf.stanford.edu Tue Feb 15 07:44:04 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Feb 2011 07:44:04 -0800 Subject: Shutdown evalign SNF 2011-02-15 07:44:03: Lamp Explosion !!!!!! Message-ID: User Left the system Under Unknown Condition ( she or he probably Power off the entire Tool. Came In Power everything Back On , and we heard a lamp Explosion , We will have to Clean it up , " this is why Theres a sign " Do not power Off , " On the tool!! Report it On Coral and we'll Check It the next day, Sorry for the Inconvinience. From mahnaz at snf.stanford.edu Fri Feb 18 16:03:56 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 18 Feb 2011 16:03:56 -0800 Subject: Shutdown evalign SNF 2011-02-15 07:44:03: Lamp Explosion !!!!!! Message-ID: From mahnaz at snf.stanford.edu Fri Feb 18 16:08:17 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 18 Feb 2011 16:08:17 -0800 Subject: Comment evalign SNF 2011-02-18 16:08:16: Up date non critical work only Message-ID: The parts that have been damaged are on order and we have been told that we will get them Wedensday of the next week. The lamp intensity at it best is at 8mw so I am only releasing the system for non critical work and please do a test wafer . 3612, 1 um you need minimum of 1.9 seconds of exposure. From vilanova at snf.stanford.edu Thu Feb 24 14:55:15 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 24 Feb 2011 14:55:15 -0800 Subject: Shutdown evalign SNF 2011-02-24 14:55:15: Under maintenance.... Message-ID: Under maintenance Until Tomorrow before Noon..... From vilanova at snf.stanford.edu Fri Feb 25 13:46:38 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 25 Feb 2011 13:46:38 -0800 Subject: Shutdown evalign SNF 2011-02-24 14:55:15: Under maintenance.... Message-ID: Lamp cxhange calibration Completed + Ellipsoidal Mirror Replaced Intensity Average = 12.24Wm/Cm2 Uniformity = 3.68%