From vilanova at snf.stanford.edu  Fri Mar  4 10:47:01 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 4 Mar 2011 10:47:01 -0800
Subject: Comment evalign SNF 2011-03-04 10:47:00: Weekly Lamp Calibration Results
Message-ID: <mailman.1114.1357938361.25704.evalign-pcs@snf.stanford.edu>

Weekly Lamp Calibration Results:
Uniformity = 2.89%
Intensity  Average = 10.70mW/Cm2



From dasgupta at snf.stanford.edu  Tue Mar  8 16:59:53 2011
From: dasgupta at snf.stanford.edu (dasgupta at snf.stanford.edu)
Date: Tue, 8 Mar 2011 16:59:53 -0800
Subject: Problem evalign SNF 2011-03-08 16:59:53: severe underexposure
Message-ID: <mailman.1115.1357938361.25704.evalign-pcs@snf.stanford.edu>

I tested 4 wafers with 1 um resist on bare Si for various exposure times from 1.5-1.9 s, and experienced severe underexposure/residual resist on the wafer after standard development.



From gsosa at snf.stanford.edu  Wed Mar  9 11:45:24 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 9 Mar 2011 11:45:24 -0800
Subject: Problem evalign SNF 2011-03-08 16:59:53: severe underexposure
Message-ID: <mailman.1116.1357938361.25704.evalign-pcs@snf.stanford.edu>

Checked lamp intensity.
 Mean Intensity: 10.03
 Uniformity: 2.58



From gsosa at snf.stanford.edu  Wed Mar  9 11:46:42 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 9 Mar 2011 11:46:42 -0800
Subject: Problem evalign SNF 2011-02-14 20:26:52: Screen does not turn on
Message-ID: <mailman.1117.1357938361.25704.evalign-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Wed Mar  9 11:47:22 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 9 Mar 2011 11:47:22 -0800
Subject: Comment evalign SNF 2011-03-09 11:47:22: Intensity check 3/9
Message-ID: <mailman.1118.1357938361.25704.evalign-pcs@snf.stanford.edu>

Checked lamp intensity.
 Mean Intensity: 10.03
 Uniformity: 2.58



From vilanova at snf.stanford.edu  Thu Mar 17 08:32:17 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 17 Mar 2011 08:32:17 -0700
Subject: Comment evalign SNF 2011-03-17 08:32:17: Weekly Intensity CHeck  3/17
Message-ID: <mailman.1119.1357938361.25704.evalign-pcs@snf.stanford.edu>

Intensity = 9.11Mw/Cm2
Uniformity 3%



From vilanova at snf.stanford.edu  Fri Mar 25 07:55:31 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 25 Mar 2011 07:55:31 -0700
Subject: Shutdown evalign SNF 2011-03-25 07:55:31: Monthly Lamp change In progress.... 
Message-ID: <mailman.1120.1357938361.25704.evalign-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Fri Mar 25 09:12:50 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 25 Mar 2011 09:12:50 -0700
Subject: Shutdown evalign SNF 2011-03-25 07:55:31: Monthly Lamp change In progress.... 
Message-ID: <mailman.1121.1357938361.25704.evalign-pcs@snf.stanford.edu>

Monthly Lamp Completed. 



From vilanova at snf.stanford.edu  Fri Mar 25 09:17:30 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 25 Mar 2011 09:17:30 -0700
Subject: Comment evalign SNF 2011-03-25 09:17:29: Montly Lamp Calibration Results
Message-ID: <mailman.1122.1357938361.25704.evalign-pcs@snf.stanford.edu>

Monthly Lamp and Calibration Results:
Average Intensity = 12.48mW/Cm2
Unifo0rmity = 2.97%
                                      12.56
                                          
  12.84                         12.78                          12.10
                                     12.13