From vilanova at snf.stanford.edu  Tue May  3 10:46:29 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 3 May 2011 10:46:29 -0700
Subject: Shutdown evalign SNF 2011-05-03 10:46:29: Monthly Lamp Change In Progress... 
Message-ID: <mailman.1130.1357938361.25704.evalign-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue May  3 11:26:43 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 3 May 2011 11:26:43 -0700
Subject: Shutdown evalign SNF 2011-05-03 10:46:29: Monthly Lamp Change In Progress... 
Message-ID: <mailman.1131.1357938361.25704.evalign-pcs@snf.stanford.edu>

Lamp changed Completed 
 Average Intensity =  12.61Mw/Cm2
Uniformity = 3%



From zappe at snf.stanford.edu  Tue May 17 22:53:00 2011
From: zappe at snf.stanford.edu (zappe at snf.stanford.edu)
Date: Tue, 17 May 2011 22:53:00 -0700
Subject: Problem evalign SNF 2011-05-17 22:52:59: vacuum sensor error
Message-ID: <mailman.1132.1357938361.25704.evalign-pcs@snf.stanford.edu>

when I came to the machine, the mask holder was not inserted



From gsosa at snf.stanford.edu  Wed May 18 08:47:21 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 18 May 2011 08:47:21 -0700
Subject: Problem evalign SNF 2011-05-17 22:52:59: vacuum sensor error
Message-ID: <mailman.1133.1357938361.25704.evalign-pcs@snf.stanford.edu>

Checked mask holder and top plate and found 1 o-ring missing, causing vacuum leak. Replaced the o-ring. Tested mask loading and system operation. All OK.



From vilanova at snf.stanford.edu  Wed May 25 09:01:55 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 25 May 2011 09:01:55 -0700
Subject: Comment evalign SNF 2011-05-25 09:01:55: Lamp Calibration 
Message-ID: <mailman.1134.1357938361.25704.evalign-pcs@snf.stanford.edu>

Here are the Lamp Calibration Results:
Average Intensity = 9.53mW/Cm2
Uniformity = 2.10%



From jasmine at snf.stanford.edu  Thu May 26 18:09:35 2011
From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu)
Date: Thu, 26 May 2011 18:09:35 -0700
Subject: Shutdown evalign SNF 2011-05-26 18:09:34: 
Message-ID: <mailman.1135.1357938361.25704.evalign-pcs@snf.stanford.edu>

vacuum sensor error pops up
and the microscope keeps drifting ( Mahnaz witnessed this the other day also if you need a description)



From vilanova at snf.stanford.edu  Fri May 27 08:07:09 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 27 May 2011 08:07:09 -0700
Subject: Shutdown evalign SNF 2011-05-26 18:09:34: 
Message-ID: <mailman.1136.1357938361.25704.evalign-pcs@snf.stanford.edu>

Reinstalled O ring and Exposed wafers, NO Vacuum Error, Ok 
to use. 



From jasmine at snf.stanford.edu  Fri May 27 12:12:24 2011
From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu)
Date: Fri, 27 May 2011 12:12:24 -0700
Subject: Shutdown evalign SNF 2011-05-27 12:12:24: 
Message-ID: <mailman.1137.1357938361.25704.evalign-pcs@snf.stanford.edu>




From mahnaz at snf.stanford.edu  Fri May 27 15:24:20 2011
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Fri, 27 May 2011 15:24:20 -0700
Subject: Shutdown evalign SNF 2011-05-27 12:12:24: 
Message-ID: <mailman.1138.1357938361.25704.evalign-pcs@snf.stanford.edu>

I tested the system and went over few issues with jasmine. The focus on the right side without doing
 anything was going in and out.
I did a training afterward and not sure why the focus goes out on left side when the wafer is loaded.
The joystick drift is a huge issue.
I like to suggest that the 4 bellows get a good clean for now.