Problem evalign SNF 2011-05-17 22:52:59: vacuum sensor error

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed May 18 08:47:21 PDT 2011


Checked mask holder and top plate and found 1 o-ring missing, causing vacuum leak. Replaced the o-ring. Tested mask loading and system operation. All OK.




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