From vilanova at snf.stanford.edu Tue Sep 13 13:57:10 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 13 Sep 2011 13:57:10 -0700 Subject: Shutdown evalign SNF 2011-09-13 13:57:10: Monthly Lamp change and calibration In progress..... Message-ID: From mahnaz at snf.stanford.edu Tue Sep 13 15:16:38 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 13 Sep 2011 15:16:38 -0700 Subject: Shutdown evalign SNF 2011-09-13 13:57:10: Monthly Lamp change and calibration In progress..... Message-ID: The lamp was changed today 9/13 but we were not able to get the intensity up to where we like it (around 11mw). At the moment the intensity is at 7mw so Please do a test wafer 1 um of 3612 requires minimum of 2.3 seconds of exposure. 1.6 um of 3612 requires minimum of 3.2 to 3.4 seconds of exposure. We will work on this again tomorrow first thing in the morning. Litho team From mahnaz at snf.stanford.edu Wed Sep 14 15:50:05 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Sep 2011 15:50:05 -0700 Subject: Comment evalign SNF 2011-08-02 09:26:52: lamp changed and calibrated Message-ID: From mahnaz at snf.stanford.edu Wed Sep 14 16:01:55 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Sep 2011 16:01:55 -0700 Subject: Comment evalign SNF 2011-08-15 14:26:28: Lamp Calibration Results Message-ID: From mahnaz at snf.stanford.edu Wed Sep 14 16:02:26 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Sep 2011 16:02:26 -0700 Subject: Comment evalign SNF 2011-09-14 16:02:25: Lamp intensity is at 15MW Message-ID: The lamp was changed today and some adjustment was done by Mario He manged to get the intensity up to 15mw by cleaning the second mirror. So please note the intensity is 15 mw now Ran 3612 1 um the exposure 1.1 seconds ran 3612 1.6 um exposure 1.6 seconds the log sheet next to the tool has been updated and please read the note next to the tool. litho team