Shutdown evalign SNF 2011-09-13 13:57:10: Monthly Lamp change and calibration In progress.....

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Sep 13 15:16:38 PDT 2011


The lamp was changed today 9/13 but we were not able to get the intensity up to where we like it (around 11mw).
At the moment the intensity is at 7mw so
Please do a test wafer
1 um of 3612 requires minimum of 2.3 seconds of exposure.
1.6 um of 3612 requires minimum of 3.2 to 3.4 seconds of exposure.
We will work on this again tomorrow first thing in the morning.
Litho team




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