Comment evalign SNF 2011-09-14 16:02:25: Lamp intensity is at 15MW

mahnaz at mahnaz at
Wed Sep 14 16:02:26 PDT 2011

The lamp was changed today and some adjustment was done by Mario
He manged to get the intensity up to 15mw by cleaning the second mirror.
So please note the intensity is 15 mw now
Ran 3612 1 um the exposure   1.1 seconds
ran 3612   1.6 um    exposure    1.6 seconds
the log sheet next to the tool has been updated and please read the note next to the tool.
litho team

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