From mahnaz at snf.stanford.edu  Tue Feb 14 14:08:30 2012
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Tue, 14 Feb 2012 14:08:30 -0800
Subject: Shutdown evalign SNF 2011-12-14 11:22:00: shutdown
Message-ID: <mailman.1198.1357938362.25704.evalign-pcs@snf.stanford.edu>

lamp intensity at 16mw
ran si, 3612, 1um   exposure 1.0
1.5 um resolved across the wafer
3612, 1.6um, exposure  1.6s
1.5 um resolved top, L,R,    2 um in center and flat.
log sheet hs been updated.



From ludwig at snf.stanford.edu  Wed Feb 29 12:17:39 2012
From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu)
Date: Wed, 29 Feb 2012 12:17:39 -0800
Subject: Shutdown evalign SNF 2012-02-29 12:17:38: loss of vacuum
Message-ID: <mailman.1199.1357938362.25704.evalign-pcs@snf.stanford.edu>