From gsosa at snf.stanford.edu Thu Mar 1 13:31:10 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Mar 2012 13:31:10 -0800 Subject: Shutdown evalign SNF 2012-03-01 13:31:09: No power 3/1 Message-ID: The system will not power up. Troubleshot and isolated down to a bad DC power supply. Actively working with EVG to aquire a new power supply. From gsosa at snf.stanford.edu Tue Mar 13 14:49:38 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 13 Mar 2012 14:49:38 -0700 Subject: Comment evalign SNF 2012-03-13 14:49:38: Update 3/13 Message-ID: The correct power supply is being shipped today. Expected arrival is tomorrow. From gsosa at snf.stanford.edu Wed Mar 14 15:33:15 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 14 Mar 2012 15:33:15 -0700 Subject: Shutdown evalign SNF 2012-02-29 12:17:38: loss of vacuum Message-ID: No system power. Replaced the system power supply. Verified power up and system initialization.-OK. Ignited and warmed up lamp. Checked and adjusted intensity. Ave Intensity 14.87, Uniformity: 1.79. Cycled wafers through system- All OK. From gsosa at snf.stanford.edu Wed Mar 14 15:33:21 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 14 Mar 2012 15:33:21 -0700 Subject: Shutdown evalign SNF 2012-03-01 13:31:09: No power 3/1 Message-ID: No system power. Replaced the system power supply. Verified power up and system initialization.-OK. Ignited and warmed up lamp. Checked and adjusted intensity. Ave Intensity 14.87, Uniformity: 1.79. Cycled wafers through system- All OK. From gsosa at snf.stanford.edu Wed Mar 14 15:33:59 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 14 Mar 2012 15:33:59 -0700 Subject: Comment evalign SNF 2012-03-14 15:33:58: Update 3/14 Message-ID: No system power. Replaced the system power supply. Verified power up and system initialization.-OK. Ignited and warmed up lamp. Checked and adjusted intensity. Ave Intensity 14.87, Uniformity: 1.79. Cycled wafers through system- All OK. System up and ready for use. From vilanova at snf.stanford.edu Thu Mar 15 11:03:39 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Mar 2012 11:03:39 -0700 Subject: Comment evalign SNF 2012-03-15 11:03:38: Lamp Intensity + uniformity check Message-ID: Average Intensity = 14.55 Mw/Cm2 Uniformity 3% From mahnaz at snf.stanford.edu Thu Mar 15 15:49:40 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 15 Mar 2012 15:49:40 -0700 Subject: Problem evalign SNF 2012-03-15 15:49:40: ran 4 wafers resolution no good Message-ID: adjusted expo. pressure still not happy about it. will continue tomorrow From lindaw at snf.stanford.edu Mon Mar 19 12:47:22 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 19 Mar 2012 12:47:22 -0700 Subject: Comment evalign SNF 2012-03-19 12:47:21: looking for unpolished bond chuck Message-ID: Where is the unpolished bond chuck hiding?? From vilanova at snf.stanford.edu Tue Mar 20 06:28:44 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 20 Mar 2012 06:28:44 -0700 Subject: Comment evalign SNF 2012-03-19 12:47:21: looking for unpolished bond chuck Message-ID: FOund it , Left it by Megasonic Cleaner. From mahnaz at snf.stanford.edu Wed Mar 21 15:36:12 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 21 Mar 2012 15:36:12 -0700 Subject: Problem evalign SNF 2012-03-15 15:49:40: ran 4 wafers resolution no good Message-ID: Ran si with 3612 , 1.6um resist thickness adjusted the wec and exposure pressure 2 um reolved the left side with flat toward me resolved 3 um. exposed at 2 seconds as I think that intensity has a bit drifted. please do not play with the system setting. From vilanova at snf.stanford.edu Tue Mar 27 13:30:45 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Mar 2012 13:30:45 -0700 Subject: Shutdown evalign SNF 2012-03-27 13:30:45: Monthly Lamp change and calibration In Progress... Message-ID: From vilanova at snf.stanford.edu Tue Mar 27 14:26:16 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Mar 2012 14:26:16 -0700 Subject: Shutdown evalign SNF 2012-03-27 13:30:45: Monthly Lamp change and calibration In Progress... Message-ID: Monthly Lamp Change and Calibration Completed Lamp Intensity Average = 15.24Mw/Cm2 Uniformity = 2.34% From vilanova at snf.stanford.edu Tue Mar 27 14:26:39 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Mar 2012 14:26:39 -0700 Subject: Comment evalign SNF 2012-03-27 14:26:38: Monthly Lamp And Calibration Results Message-ID: Monthly Lamp Change and Calibration Completed Lamp Intensity Average = 15.24Mw/Cm2 Uniformity = 2.34%