Shutdown evalign SNF 2012-02-29 12:17:38: loss of vacuum

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Mar 14 15:33:15 PDT 2012


No system power. Replaced the system power supply. Verified power up and system initialization.-OK. Ignited and warmed up lamp. Checked and adjusted intensity. Ave Intensity 14.87, Uniformity: 1.79. Cycled wafers through system- All OK.




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