Problem evalign SNF 2012-03-15 15:49:40: ran 4 wafers resolution no good

mahnaz at mahnaz at
Wed Mar 21 15:36:12 PDT 2012

Ran si with 3612 , 1.6um  resist thickness
adjusted the wec and exposure pressure
2 um reolved the left side with flat toward me resolved 3 um.
exposed at 2 seconds as I think that intensity has a bit drifted.
please do not play with the system setting.

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