Problem evalign SNF 2012-03-15 15:49:40: ran 4 wafers resolution no good

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed Mar 21 15:36:12 PDT 2012


Ran si with 3612 , 1.6um  resist thickness
adjusted the wec and exposure pressure
2 um reolved the left side with flat toward me resolved 3 um.
exposed at 2 seconds as I think that intensity has a bit drifted.
please do not play with the system setting.




More information about the evalign-pcs mailing list