From vilanova at snf.stanford.edu Wed May 2 07:56:18 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 2 May 2012 07:56:18 -0700 Subject: Shutdown evalign SNF 2012-05-02 07:56:18: Monthly Lamp Change In progress.... Message-ID: From vilanova at snf.stanford.edu Wed May 2 09:14:46 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 2 May 2012 09:14:46 -0700 Subject: Shutdown evalign SNF 2012-05-02 07:56:18: Monthly Lamp Change In progress.... Message-ID: Monthly Lamp Change Completed , Calibration Results: Top = 15.00 Center = 15.66 Bottom = 15.10 Right = 15.43 Left = 15.47 Average Intensity = 15.33Mw/Cm2 Uniformity = 2.15% From vilanova at snf.stanford.edu Wed May 2 09:15:06 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 2 May 2012 09:15:06 -0700 Subject: Comment evalign SNF 2012-05-02 09:15:05: Monthly Lamp And Calibration Completed Message-ID: Monthly Lamp Change Completed , Calibration Results: Top = 15.00 Center = 15.66 Bottom = 15.10 Right = 15.43 Left = 15.47 Average Intensity = 15.33Mw/Cm2 Uniformity = 2.15% From zguo at snf.stanford.edu Thu May 10 13:06:40 2012 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Thu, 10 May 2012 13:06:40 -0700 Subject: Problem evalign SNF 2012-05-10 13:06:39: Lost focus when load wafer Message-ID: Run the topside recipe The microscope can focus on mask layer alignment mark well. However, when load the wafer, then the microscope moves down, both lens loss focus on the alignment mark of the mask layer. (the gap was set at 40um) From vilanova at snf.stanford.edu Thu May 10 14:08:41 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 10 May 2012 14:08:41 -0700 Subject: Problem evalign SNF 2012-05-10 13:06:39: Lost focus when load wafer Message-ID: Chuck Pressure was Set up to Low, Increased the Pressure From 293 to 297 and Mask and wafer Focus Back to normal, Aligned Mask and Wafer, All Operations are Good, Ok to use. From lindaw at snf.stanford.edu Wed May 23 12:48:49 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 23 May 2012 12:48:49 -0700 Subject: Shutdown evalign SNF 2012-05-23 12:48:48: software crash Message-ID: after ending anodic program, went to put tray in, and it would not stay parked. Logged out, and then logged back in and now the screen is stuck waiting for machine initialization. The tray is still out. From vilanova at snf.stanford.edu Wed May 23 13:26:04 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 23 May 2012 13:26:04 -0700 Subject: Shutdown evalign SNF 2012-05-23 12:48:48: software crash Message-ID: Initialized machine, and parked tray ,Logout and In again to test it, All operations Ok, Good to use.