Problem evalign SNF 2012-05-10 13:06:39: Lost focus when load wafer

zguo at snf.stanford.edu zguo at snf.stanford.edu
Thu May 10 13:06:40 PDT 2012


Run the topside recipe
The microscope can focus on mask layer alignment mark well.
However, when load the wafer, then the microscope moves down, both lens loss focus on the alignment mark of the mask layer. (the gap was set at 40um)




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