Problem evalign SNF 2012-05-10 13:06:39: Lost focus when load wafer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu May 10 14:08:41 PDT 2012


Chuck Pressure was Set up to Low, Increased the Pressure From
293 to 297 and  Mask and wafer Focus Back to normal, Aligned Mask and Wafer, All Operations are Good, Ok to use. 




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