From sanli at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Apr 24, 2000 Subject: Problem evalign: vacuum sensor error Message-ID: evalign is not working, it is giving vacuum sensor error From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 24, 2000 Subject: Problem Clear evalign: Message-ID: cleaned contamination from chuck, centered chuck and exposed wafer with hard contact. ok to use. From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 25, 2000 Subject: Problem Clear evalign: Message-ID: no problem with ev620. cleared flow alarm on ev801 From pruitt at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: pruitt at snf.stanford.edu (pruitt at snf.stanford.edu) Date: Apr 28, 2000 Subject: Problem evalign: backside align won't focus adjust Message-ID: backside allign is still messed up (firmware upgrade bug???) you can't adjust focus once the wafer is loaded. problem because wafer thicknesses and resist thickness change the focal plane from wafer to wafer. From mahnaz at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Apr 28, 2000 Subject: Problem Clear evalign: system is up Message-ID: From yunli at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: yunli at snf.stanford.edu (yunli at snf.stanford.edu) Date: May 4, 2000 Subject: Problem evalign: vacuum is not working! Message-ID: From emc at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: emc at snf.stanford.edu (emc at snf.stanford.edu) Date: May 10, 2000 Subject: Problem evalign: vacuum won't hold mask! Message-ID: while doing backside align, the mask was not being held by the vacuum... it worked for couple times, somewhat intermittently, and then not at all..... since the load is the same for the frontside, i imagine it won't work for frontside alignment either (which i need to do also...) looks like the tray is sagging a lot? From prisbe at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: prisbe at snf.stanford.edu (prisbe at snf.stanford.edu) Date: May 10, 2000 Subject: Problem Clear evalign: vacuum working fine Message-ID: tried loading a mask a few times and found no problem. The last person who used it moved the tray in with the load frame still on it. The chuck was centered well when I found it. From prisbe at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: prisbe at snf.stanford.edu (prisbe at snf.stanford.edu) Date: May 10, 2000 Subject: Problem Clear evalign: vacuum working¨ Message-ID: Same problem written up twice. As last reported, no problem found on testing it. From lian at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: lian at snf.stanford.edu (lian at snf.stanford.edu) Date: May 11, 2000 Subject: Problem evalign: Message-ID: optics cannot start properly. From lian at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: lian at snf.stanford.edu (lian at snf.stanford.edu) Date: May 11, 2000 Subject: Problem evalign: Message-ID: burnt bulb From liuhao at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: liuhao at snf.stanford.edu (liuhao at snf.stanford.edu) Date: May 14, 2000 Subject: Problem evalign: eyepieces don't move Message-ID: From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 15, 2000 Subject: Problem Clear evalign: Message-ID: initialized and tested system. npf. From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 15, 2000 Subject: Problem Clear evalign: Message-ID: npf. From franklin at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: franklin at snf.stanford.edu (franklin at snf.stanford.edu) Date: May 18, 2000 Subject: Shutdown evalign: endpositio reached Message-ID: On startup objectives moved all the way to the back and stayed there. "Endposition reached message. Machine was left w/ the mask holder in. I find the machine a lot this way. Many people do not do the shutdown properly. I wonder if this could be causing some of these microscope positioning problems From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 18, 2000 Subject: Problem Clear evalign: Message-ID: From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 18, 2000 Subject: Shutdown Clear evalign: Message-ID: system re initialized , ready to use. From jac at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: jac at snf.stanford.edu (jac at snf.stanford.edu) Date: May 21, 2000 Subject: Problem evalign: locked up in middle of process Message-ID: From jac at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: jac at snf.stanford.edu (jac at snf.stanford.edu) Date: May 21, 2000 Subject: Problem evalign: as above Message-ID: From sanli at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: May 21, 2000 Subject: Problem evalign: system cannot initialize Message-ID: The system is stuck in a weird state, and the software cannot initialize it. From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 22, 2000 Subject: Problem Clear evalign: Message-ID: enabled & initialized EV620. ready for use. From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 22, 2000 Subject: Problem Clear evalign: Message-ID: enabled and initialized EV620. ok to use From dtlee at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: dtlee at snf.stanford.edu (dtlee at snf.stanford.edu) Date: Jun 14, 2000 Subject: Problem evalign: locked up after trying to park tray Message-ID: From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 15, 2000 Subject: Problem Clear evalign: Message-ID: initialized system, placed tray in park position. ready for use. From takamura at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: takamura at snf.stanford.edu (takamura at snf.stanford.edu) Date: Jun 21, 2000 Subject: Problem evalign: evalign system unstable Message-ID: the evalign system became unstable after loading my mask and the screen started flashing. the only option was to exit which prompted a message that the system would be left in an undefined state. with the help of some other users we restarted the computer and the system and were able to extract the mask. We had problems with the system hanging during the initialization stage. From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 22, 2000 Subject: Problem Clear evalign: Message-ID: removed mask and initialized the system, cleaned pen marks on the chuck. PLEASE!!! do not mark the surface of the wafer chuck. From pzwahlen at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu) Date: Jul 10, 2000 Subject: Problem evalign: vacuum sensor error Message-ID: This error message occurs when the vacuum should turn on to hold the mask. There is no way to get around it, and the program will automatically guide you in the exit procedure. Either the vacuum sensor is dead or the vacuum line is leaking. However I can't hear the pressure trying to suck down. From dbr at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: dbr at snf.stanford.edu (dbr at snf.stanford.edu) Date: Jul 10, 2000 Subject: Problem evalign: left in ill-defined state Message-ID: After running into the vacuum sensor error & getting confused, I mindlessly disabled the instrument without exiting properly. This left the instrument in an ill-defined state. The instrument can't be used anyway due to the vacuum problem, but I apologize if I made things worse. From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 11, 2000 Subject: Problem Clear evalign: Message-ID: initialized system, mask vac working ok From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 11, 2000 Subject: Problem Clear evalign: Message-ID: initialized system, mask vacuum working ok From hansen at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Jul 12, 2000 Subject: Problem evalign: Y-micrometer mis-thread - stuck Message-ID: After moving the y-micrometer to its limit on EVAlign, when I turned it back, I met lots of resistance, as if the micrometer was off by a thread. In the process of trying to get it back on track, it seems I stripped the thread and now the micrometer won't move. I am very sorry about this! Sean Hansen From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 14, 2000 Subject: Problem Clear evalign: Message-ID: npf From mahnaz at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jul 17, 2000 Subject: Shutdown evalign: broken macrometer Message-ID: From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 24, 2000 Subject: Shutdown Clear evalign: Message-ID: replaced y stage micrometer. ready for use From amos at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: amos at snf.stanford.edu (amos at snf.stanford.edu) Date: Jul 25, 2000 Subject: Problem evalign: End position error Message-ID: The program for running the EV620 displays the message "Endposition reached!!" and the microscope stage remains at one end of its travel. This occurred after the prompt to move in the tray. Everything apparently proceeded normally thereafter, but the microscope stage did not move to its usual position. From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 26, 2000 Subject: Problem Clear evalign: Message-ID: npf From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 26, 2000 Subject: Problem Clear evalign: Message-ID: system reinitilized ok to use From rmzapata at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: rmzapata at snf.stanford.edu (rmzapata at snf.stanford.edu) Date: Jul 27, 2000 Subject: Problem evalign: Message-ID: Program: Back side alignment; At final "adjust wafer" step, the system will not enable the "scan optics" to make final adjustment critical for alignment. From rmzapata at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: rmzapata at snf.stanford.edu (rmzapata at snf.stanford.edu) Date: Jul 27, 2000 Subject: Problem evalign: Reciepe: Backside alignment Problem; At the final "adjust wafer" step thesystem will not enable "scan optics", to make final wafer to pattern adjustments for final alignment. Message-ID: From aaronp at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Jul 27, 2000 Subject: Shutdown evalign: right microscope eyepiece low Message-ID: From mahnaz at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jul 28, 2000 Subject: Shutdown evalign: clear Message-ID: I have adjusted the Z, please be careful when focusing. the max on the Z focus is 800 if you pass it, it will jam the system. From mahnaz at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jul 28, 2000 Subject: Shutdown evalign: Message-ID: From bmurray at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: bmurray at snf.stanford.edu (bmurray at snf.stanford.edu) Date: Jul 28, 2000 Subject: Shutdown Clear evalign: Message-ID: Mahnaz fixed the Z focus. Please be careful. The maximum limit is 800. From bmurray at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: bmurray at snf.stanford.edu (bmurray at snf.stanford.edu) Date: Jul 28, 2000 Subject: Shutdown Clear evalign: Message-ID: From bmurray at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: bmurray at snf.stanford.edu (bmurray at snf.stanford.edu) Date: Jul 28, 2000 Subject: Shutdown Clear evalign: Message-ID: From bmurray at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: bmurray at snf.stanford.edu (bmurray at snf.stanford.edu) Date: Jul 28, 2000 Subject: Problem Clear evalign: Message-ID: From bmurray at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: bmurray at snf.stanford.edu (bmurray at snf.stanford.edu) Date: Jul 28, 2000 Subject: Problem Clear evalign: Message-ID: From mcp at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: mcp at snf.stanford.edu (mcp at snf.stanford.edu) Date: Aug 21, 2000 Subject: Problem evalign: EV Aligner Message-ID: When I try to load a mask, I get a vacuum sensor error, and can hear air flowing. Something seems not to be sealing.... 5" mask, backside alignment From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 21, 2000 Subject: Problem Clear evalign: Message-ID: no problem found From dbr at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: dbr at snf.stanford.edu (dbr at snf.stanford.edu) Date: Aug 21, 2000 Subject: Problem evalign: forgot to logout - locked up Message-ID: The evalign software locked up because I forgot to log out before disabling. Sorry. From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 22, 2000 Subject: Comment evalign: Message-ID: error cleared. ok to use. From mcp at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: mcp at snf.stanford.edu (mcp at snf.stanford.edu) Date: Aug 22, 2000 Subject: Problem evalign: EV Aligner Message-ID: The machine is completely locked up -- cursor frozen, etc. It also appears that the last person to use it didn't shut it down properly -- you cn hear air flowing, and the tray is in the parked position w/o the mask holder. Could someone pls email the list when this machine is functional again????? Thanks! Mark Peterman Bloom Group/3-0150 From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 22, 2000 Subject: Comment evalign: Message-ID: lamp changed system up & running ready to use From martinez at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 22, 2000 Subject: Comment evalign: Message-ID: lamp change and calibration done. ok to use From jdfraser at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: jdfraser at snf.stanford.edu (jdfraser at snf.stanford.edu) Date: Aug 23, 2000 Subject: Comment evalign: Message-ID: From ericp at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sep 14, 2000 Subject: Problem evalign: Theta micrometer in bad shape! Message-ID: Theta micrometer is TIGHT, and has come loose from its mount. From mahnaz at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sep 15, 2000 Subject: Shutdown evalign: broken theta micrometer Message-ID: From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sep 18, 2000 Subject: Problem Clear evalign: Message-ID: micrometer replaced, ok to use From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sep 18, 2000 Subject: Shutdown Clear evalign: Message-ID: micrometer replaced, ok to use From jochenstehle at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: jochenstehle at snf.stanford.edu (jochenstehle at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Problem evalign SNF 2012-08-30 17:49:41: trackball doesn't work Message-ID: <1789537.140.1346374182416.JavaMail.coral@shine> trackball doesn't work, so I can't click on or to proceed. Mask is still in the tool, I left the box for the mask right next to the evalign. From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Comment evalign SNF 2012-09-04 09:23:34: Monthly Lamp Changed + Calibrated Message-ID: <23070101.6.1346775815766.JavaMail.coral@shine> Average Intensity = 15.44Mw/Cm2 Uniformity = 1.16% From gsosa at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Problem evalign SNF 2012-08-30 17:49:41: trackball doesn't work Message-ID: <32275834.7.1346776839856.JavaMail.coral@shine> Reset system From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Comment evalign SNF 2012-10-02 11:39:17: Monthly Lamp Change and Calibration Completed Message-ID: <31731034.6.1349203158305.JavaMail.coral@shine> Average Intensity =15.41Mw/Cm2 Uniformity = 2.41% From asamarao at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: asamarao at snf.stanford.edu (asamarao at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Comment evalign SNF 2012-10-08 12:38:30: Vacuum wont turn OFF Message-ID: <16281814.27.1349725111189.JavaMail.coral@shine> I was aligning two wafers to each other. When I had to push in the flags, one of them ended up separating the wafers (as it was not flat) and that led the the bottom wafer fall off on the bottom chuck. Nothing broke thankfully. Although I have retrieved the wafers and quartz plate safely, the vacuum of the system would not turn OFF. The system might need a reset. From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Comment evalign SNF 2012-10-08 12:38:30: Vacuum wont turn OFF Message-ID: <11029319.2.1349729972706.JavaMail.coral@shine> Re initialized System, And tested ok to use. From asamarao at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: asamarao at snf.stanford.edu (asamarao at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Shutdown evalign SNF 2012-10-10 11:27:28: the mask holder would not fit into position Message-ID: <16194260.50.1349893648345.JavaMail.coral@shine> the system might need a reset. there are some protruding rails on the side that is preventing the 5 inch mask holder from clicking into position. From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Shutdown evalign SNF 2012-10-10 11:27:28: the mask holder would not fit into position Message-ID: <24246786.53.1349894738988.JavaMail.coral@shine> Cleaned up the mask rails and tried a few times, Everything Fine Ok to use,. From gsosa at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Shutdown evalign SNF 2012-10-11 17:06:44: Focus issue Message-ID: <32952512.103.1350000405679.JavaMail.coral@shine> Unable to focus on mask and wafer at the same time with an align gap of 40um. Visually, you can see a large gap between the bottom of the mask and the top of the wafer( about 1 to 2 mm) Tried hard resetting the computer and hardware and cleaning all critical surfaces. Still no improvement. Need to investigate further. From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Problem evalign SNF 2012-10-12 09:26:46: Mask Holder Damaged Message-ID: <5209213.109.1350059206792.JavaMail.coral@shine> I Found The mask Holder damaged it has some Dents & Marks At the Bottom End Mahnaz and I Ran Some tests and Focus Still Bad ( Cant Focus On mask and Wafer at the same time) We will Continue checking the System and testing In Progress... From gsosa at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Shutdown evalign SNF 2012-10-11 17:06:44: Focus issue Message-ID: <28204248.17.1350333645552.JavaMail.coral@shine> Reseated all PC boards and connectors. Tested at various separation gaps from 1 to 800 microns. Align gap responding properly now. Possibly a bit was stuck and align gap setting not being interpreted correctly. Tested many times with mask and wafer load/unload/expose. Reset the tool many times. Align gap working correctly now. Please report if problem returns From gsosa at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Problem evalign SNF 2012-10-12 09:26:46: Mask Holder Damaged Message-ID: <2006377.18.1350333652621.JavaMail.coral@shine> Reseated all PC boards and connectors. Tested at various separation gaps from 1 to 800 microns. Align gap responding properly now. Possibly a bit was stuck and align gap setting not being interpreted correctly. Tested many times with mask and wafer load/unload/expose. Reset the tool many times. Align gap working correctly now. Please report if problem returns From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Comment evalign SNF 2012-11-06 09:11:42: Lamp Change and Calibration Completed Message-ID: <5964454.9.1352221902730.JavaMail.coral@shine> Lamp Change and Calibration Completed Average Intensity = 15Mw/Cm2 Uniformity = 1.41% From gyama at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Problem evalign SNF 2012-11-21 10:49:59: stuck in initilization Message-ID: <29713020.19.1353523800171.JavaMail.coral@shine> From gyama at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Shutdown evalign SNF 2012-11-21 11:21:22: software stuck Message-ID: <9638098.20.1353525683177.JavaMail.coral@shine> From gsosa at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Shutdown evalign SNF 2012-11-21 11:21:22: software stuck Message-ID: <12804261.0.1353531954094.JavaMail.coral@shine> No power to Badger box. Plugged in badger box directly to outlet in service chase. Still no response. Server reset cleared up the problem. From gsosa at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Problem evalign SNF 2012-11-21 10:49:59: stuck in initilization Message-ID: <28365628.1.1353531978351.JavaMail.coral@shine> No power to Badger box. Plugged in badger box directly to outlet in service chase. Still no response. Server reset cleared up the problem. From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Comment evalign SNF 2012-12-04 09:28:28: Monthly Lamp changed and calibrated Message-ID: <12735378.54.1354642108724.JavaMail.coral@shine> Monthly Lamp changed and calibrated Intensity Average = 15.0Mw/Cm2 Uniformity = 1.5% From mahnaz at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Problem evalign SNF 2012-12-12 15:03:40: system jammed Message-ID: <31947169.2.1355353421511.JavaMail.coral@shine> mario is working on it. From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Problem evalign SNF 2012-12-12 15:03:40: system jammed Message-ID: <13859719.3.1355353919717.JavaMail.coral@shine> Unjammed system, re started computer , initialized system and tested, All operations Ok, Good to use. From lindaw at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Problem evalign SNF 2012-12-12 15:42:22: chine won't initialize Message-ID: <18957862.5.1355355743487.JavaMail.coral@shine> From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Problem evalign SNF 2012-12-12 15:42:22: chine won't initialize Message-ID: <604527.19.1355413768369.JavaMail.coral@shine> Computer System Ok, I've tested the system ( put in my mask , aligned it and exposed wafer ) everything looks Normal, I will keep an eye on it, I will be checking it through out the day to make sure everything is fine . From jrshakya at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Problem evalign SNF 2012-12-16 16:14:24: Lamp didn't come on Message-ID: <3473957.14.1355703264405.JavaMail.coral@shine> I think lamp is out. From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Problem evalign SNF 2012-12-16 16:14:24: Lamp didn't come on Message-ID: <8671341.23.1355761391988.JavaMail.coral@shine> Found The power Supply For the Main lamp was shutOff, Powered back and checked lamp Intensity , Lamp Seetings within specs, System Ok to use. From asamarao at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: asamarao at snf.stanford.edu (asamarao at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Comment evalign SNF 2012-12-17 10:59:30: Machine Locked. Needs Power Reset. Message-ID: <1298514.26.1355770771212.JavaMail.coral@shine> Disabled the evalign by mistake while actually intending to disable gasonics. The tool was in the middle of the process and so got locked on disabling. A power reset should bring the system back up. From vilanova at snf.stanford.edu Fri Jan 11 13:05:51 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:05:51 -0000 Subject: Comment evalign SNF 2012-12-17 10:59:30: Machine Locked. Needs Power Reset. Message-ID: <13490618.34.1355778284915.JavaMail.coral@shine> Re staRTED POWER and tested system ,. Ok to use .