Problem evalign: backside align won't focus adjust

pruitt at snf.stanford.edu pruitt at snf.stanford.edu
Fri Jan 11 13:05:51 PST 2013


backside allign is still messed up (firmware upgrade bug???) you can't adjust focus once the wafer is loaded. problem because wafer thicknesses and resist thickness change the focal plane from wafer to wafer.




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