Problem evalign: vacuum won't hold mask!

emc at snf.stanford.edu emc at snf.stanford.edu
Fri Jan 11 13:05:51 PST 2013


while doing backside align, the mask was not being
held by the vacuum... it worked for couple times,
somewhat intermittently, and then not at all.....  since the
load is the same for the frontside, i imagine it won't 
work for frontside alignment either (which i need to do also...)  looks like the tray is sagging a lot?




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