Shutdown evalign: right microscope eyepiece low
aaronp at snf.stanford.edu
aaronp at snf.stanford.edu
Fri Jan 11 13:05:51 PST 2013
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Problem evalign: Reciepe: Backside alignment Problem; At the final "adjust wafer" step thesystem will not enable "scan optics", to make final wafer to pattern adjustments for final alignment.
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Problem Clear evalign: system is up
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Previous message:
Problem evalign: Reciepe: Backside alignment Problem; At the final "adjust wafer" step thesystem will not enable "scan optics", to make final wafer to pattern adjustments for final alignment.
Next message:
Problem Clear evalign: system is up
Messages sorted by:
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