Comment evalign SNF 2012-10-08 12:38:30: Vacuum wont turn OFF

asamarao at snf.stanford.edu asamarao at snf.stanford.edu
Fri Jan 11 13:05:51 PST 2013


I was aligning two wafers to each other. When I had to push in the flags, one of them ended up separating the wafers (as it was not flat) and that led the the bottom wafer fall off on the bottom chuck. Nothing broke thankfully. Although I have retrieved the wafers and quartz plate safely, the vacuum of the system would not turn OFF. The system might need a reset. 



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