Shutdown evalign SNF 2012-10-11 17:06:44: Focus issue

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jan 11 13:05:51 PST 2013


Unable to focus on mask and wafer at the same time with an align gap of 40um. Visually, you can see a large gap between the bottom of the mask and the top of the wafer( about 1 to 2 mm) Tried hard resetting the computer and hardware and cleaning all critical surfaces. Still no improvement. Need to investigate further.



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